Kuchenesa nekuchenesa (Wet Clean) ndeimwe yematanho akakosha mukugadzira semiconductor, ine chinangwa chekubvisa tsvina dzakasiyana-siyana pamusoro pewafer kuitira kuti matanho anotevera ekugadzirisa agone kuitwa panzvimbo yakachena.
Sezvo saizi yemidziyo ye semiconductor ichiramba ichiderera uye zvinodiwa nemazvo zvichiwedzera, zvinodiwa zvehunyanzvi zvekuchenesa wafer zvave zvakanyanya kuoma. Kunyangwe zvidimbu zvidiki, zvinhu zve organic, ma ions esimbi, kana oxide residues pamusoro pewafer zvinogona kukanganisa zvakanyanya mashandiro emudziyo, nokudaro zvichikanganisa kugona kwemidziyo ye semiconductor uye kuvimbika kwayo.
Nheyo Dzekutanga dzeKuchenesa Wafer
Chinangwa chikuru chekuchenesa wafer ndechekubvisa zvinobudirira tsvina dzakasiyana-siyana pamusoro pewafer kuburikidza nenzira dzepanyama, dzemakemikari, nedzimwe nzira kuti ive nechokwadi chekuti wafer ine nzvimbo yakachena yakakodzera kugadziriswa.
Rudzi rweKusvibiswa
Zvinokonzera Hunhu Hwakanyanya paMudziyo
| Kusvibiswa kwechinyorwa | Zvikanganiso zvemapateni
Zvikanganiso zvekuisirwa kweIon
Zvikanganiso zvekubvisa mafirimu ekudzivirira
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| Kusvibiswa kwesimbi | Simbi dzeAlkali | Kusagadzikana kweMOS transistor
Kuputsika/kuora kwefirimu reGedhi oxide
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| Simbi Dzinorema | Kuwedzera kwePN junction reverse leakage current
Zvikanganiso zveGedhi oxide firimu
Kuora kwehupenyu hwevatakuri vevashoma
Kugadzirwa kwezvikanganiso zveOxide excitation layer
| |
| Kusvibiswa kweMakemikoro | Zvinhu zveOrganic | Zvikanganiso zveGedhi oxide firimu
Kusiyana kwemafirimu eCVD (nguva dzekufukidzira)
Kusiyana kweukobvu hwefirimu reThermal oxide (kukurumidziswa kweoxidation)
Kuonekwa kwemhute (wafer, lenzi, girazi, chifukidzo, reticle)
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| Zvidhori Zvisina Kugadzirwa (B, P) | MOS transistor Vth inochinja
Kusiyana kwekudzivirira kwepasi pevhu uye resistance yakakura ye poly-silicon sheet
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| Zvigadziko zveInorganic (amines, ammonia) & Acids (SOx) | Kuora kwesimba rekudzivirira kwemakemikari akawedzerwa
Kuwanikwa kwetsvina yezvidimbu uye mhute inokonzerwa nekuumbwa kwemunyu
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| Mafirimu eOxide emuno neemakemikari nekuda kwehunyoro, mhepo | Kuwedzera kwekusagona kuonana
Kuputsika/kuora kwefirimu reGedhi oxide
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Zvikuru, zvinangwa zvekuchenesa wafer zvinosanganisira:
Kubvisa Zvidimbu: Kushandisa nzira dzemuviri kana dzemakemikari kubvisa zvidimbu zvidiki zvakasungirirwa pamusoro pewafer. Zvidimbu zvidiki zvinonetsa kubvisa nekuda kwesimba guru remagetsi riri pakati pazvo nepamusoro pewafer, zvichida kurapwa kwakakosha.
Kubviswa Kwezvinhu Zvine Utachiona: Zvinhu zvine Utachiona zvakaita semafuta uye zvinoramba zviri muchimiro chephotoresist zvinogona kunamira pamusoro pewafer. Zvinhu izvi zvinowanzo bviswa uchishandisa zvinhu zvine simba zvekuoxidiza kana zvinonyungudutsa.
Kubviswa kweIoni yeSimbi: Zvisaririra zveioni yesimbi pamusoro pewafer zvinogona kukanganisa mashandiro emagetsi uye kutokanganisa matanho ekugadzirisa anotevera. Nokudaro, mishonga chaiyo yemakemikari inoshandiswa kubvisa ioni idzi.
Kubviswa kweOkisidhe: Mamwe maitiro anoda kuti pamusoro pewafer pasave ne oxide layers, dzakadai sesilicon oxide. Muzviitiko zvakadaro, natural oxide layers dzinofanira kubviswa panguva yekuchenesa kwakati.
Dambudziko rehunyanzvi hwekuchenesa mawafer riri pakubvisa tsvina zvinobudirira pasina kukanganisa pamusoro pewafer, zvakaita sekudzivirira kusviba, ngura, kana kumwe kukuvara kwemuviri.
2. Kuyerera Kwemaitiro Ekuchenesa Wafer
Maitiro ekuchenesa wafer anowanzo sanganisira matanho akawanda kuti ive nechokwadi chekuti tsvina inobviswa zvachose uye kuti nzvimbo yacho ive yakachena zvakakwana.
Mufananidzo: Kuenzanisa Pakati Pekuchenesa Kwemhando Yebatch neKuchenesa Kwewafer Imwe Chete
Maitiro ekuchenesa wafer anowanzo sanganisira matanho makuru anotevera:
1. Kuchenesa Pamberi (Kuchenesa Pamberi)
Chinangwa chekuchenesa usati watanga kubvisa tsvina yakasununguka nezvidimbu zvikuru kubva pamusoro pewafer, izvo zvinowanzoitwa kuburikidza nekusukurudza nemvura yakabviswa ion (DI Water) uye kuchenesa ne ultrasound. Mvura yakabviswa ion inogona kutanga kubvisa zvidimbu netsvina yakanyungudutswa kubva pamusoro pewafer, nepo kuchenesa ne ultrasound kuchishandisa mhedzisiro ye cavitation kuputsa chisungo chiri pakati pezvidimbu nepamusoro pewafer, zvichiita kuti zvive nyore kubvisa.
2. Kuchenesa Makemikoro
Kuchenesa nemakemikari ndeimwe yematanho makuru ekuchenesa wafer, uchishandisa mishonga yemakemikari kubvisa zvinhu zvakasikwa, maayoni esimbi, uye maoxide kubva pamusoro pewafer.
Kubviswa kweZvinhu Zvechisikigo: Kazhinji, acetone kana musanganiswa weammonia/peroxide (SC-1) unoshandiswa kunyungudutsa nekuoxidiza tsvina yechisikigo. Chiyero chakajairika chemhinduro yeSC-1 iNH₄OH
₂O₂
₂O = 1:1:5, netembiricha yekushanda inosvika 20°C.
Kubviswa kweIon yesimbi: Nitric acid kana hydrochloric acid/peroxide mixtures (SC-2) zvinoshandiswa kubvisa ions yesimbi kubva pamusoro pewafer. Chiyero chakajairika chemhinduro yeSC-2 iHCl
₂O₂
₂O = 1:1:6, tembiricha ichiramba iri pa80°C.
Kubviswa kweOkisidhe: Mune mamwe maitiro, kubviswa kwechikamu cheokisidhe chemuno kubva pamusoro pewafer kunodiwa, uko kunoshandiswa mhinduro yehydrofluoric acid (HF). Chiyero chakajairika chemhinduro yeHF iHF
₂O = 1:50, uye inogona kushandiswa patembiricha yemumba.
3. Kuchenesa Kwekupedzisira
Mushure mekucheneswa nemakemikari, mawafer anowanzo itwa danho rekupedzisira rekuchenesa kuti ave nechokwadi chekuti hapana masara emakemikari ari pamusoro. Kucheneswa kwekupedzisira kunonyanya kushandisa mvura yakabviswa maion kuti isukururwe zvakanaka. Pamusoro pezvo, kuchenesa mvura yeozone (O₃/H₂O) kunoshandiswa kubvisa tsvina yasara pamusoro pewafer.
4. Kuomesa
Mawafer akacheneswa anofanira kuomeswa nekukurumidza kudzivirira mavara emvura kana kubatanidzwazve kwetsvina. Nzira dzakajairika dzekuomesesa dzinosanganisira kuomesa ne spin uye kuchenesa nitrogen. Yekutanga inobvisa hunyoro kubva pamusoro pe wafer nekutenderera nekukurumidza, nepo yekupedzisira ichivimbisa kuoma kwakakwana nekufuridza gasi re nitrogen rakaoma pamusoro pe wafer.
Chinhu chinosvibisa
Zita reMaitiro Ekuchenesa
Tsananguro yeMusanganiswa weMakemikari
Makemikoro
| Zvidimbu | Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI mvura | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/DI mvura | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| Simbi (kwete mhangura) | SC-2 (HPM) | Hydrochloric acid/hydrogen peroxide/DI mvura | HCl/H2O2/H2O1:1:6; 85°C |
| Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI mvura | H2SO4/H2O2/H2O3-4:1; 90°C | |
| DHF | Sanganisa hydrofluoric acid/DI mvura (haizobvisi mhangura) | HF/H2O1:50 | |
| Zvepanyama | Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI mvura | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/DI mvura | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| DIO3 | Ozone mumvura isina ionized | Misanganiswa Yakagadziridzwa yeO3/H2O | |
| Oxide Yemuno | DHF | Sanganisa hydrofluoric acid/DI mvura | HF/H2O 1:100 |
| BHF | Hydrofluoric acid yakavharirwa | NH4F/HF/H2O |
3. Nzira Dzakajairika Dzekuchenesa Wafer
1. Nzira yekuchenesa yeRCA
Nzira yekuchenesa yeRCA ndeimwe yenzira dzekuchenesa dzechinyakare dzemhando yepamusoro muindasitiri yesemiconductor, yakagadzirwa neRCA Corporation makore anopfuura makumi mana apfuura. Nzira iyi inonyanya kushandiswa kubvisa tsvina yeorganic uye tsvina yesimbi uye inogona kupedzwa nematanho maviri: SC-1 (Standard Clean 1) uye SC-2 (Standard Clean 2).
Kuchenesa kweSC-1: Danho iri rinonyanya kushandiswa kubvisa tsvina yeorganic nezvidimbu. Mhinduro yacho musanganiswa weammonia, hydrogen peroxide, nemvura, iyo inoumba chidimbu chesilicon oxide pamusoro pewafer.
Kuchenesa kweSC-2: Danho iri rinonyanya kushandiswa kubvisa tsvina yesimbi yeion, uchishandisa musanganiswa wehydrochloric acid, hydrogen peroxide, nemvura. Rinosiya jira rakatetepa pamusoro pewafer kudzivirira kusvibiswa.
2. Nzira Yekuchenesa Piranha (Piranha Etch Clean)
Nzira yekuchenesa Piranha inzira inoshanda zvikuru yekubvisa zvinhu zvakasikwa, uchishandisa musanganiswa wesulfuric acid nehydrogen peroxide, kazhinji muchikamu che3:1 kana 4:1. Nekuda kwesimba rakasimba remushonga uyu, unogona kubvisa zvinhu zvakawanda zvakasikwa uye tsvina yakaoma. Nzira iyi inoda kudzora mamiriro ezvinhu zvakanyanya, kunyanya kana tichitarisa tembiricha uye huwandu hwezvinhu, kudzivirira kukuvadza wafer.
Kuchenesa kweUltrasonic kunoshandisa cavitation effect inogadzirwa nemafungu eruzha ane ruzha rwakawanda mumvura kuti ibvise tsvina kubva pamusoro pewafer. Zvichienzaniswa nekuchenesa kwetsika kweUltrasonic, kuchenesa kwemegasonic kunoshanda zvakanyanya, zvichiita kuti zvibviswe zvakanaka zvezvidimbu zve sub-micron pasina kukanganisa pamusoro pewafer.
4. Kuchenesa Ozone
Tekinoroji yekuchenesa ozone inoshandisa simba rakasimba reozone rekuoxidating kuti iore uye ibvise tsvina yeorganic kubva pamusoro pewafer, zvichizopedzisira zvaita kuti ive carbon dioxide nemvura isingakuvadzi. Nzira iyi haidi kushandiswa kwemakemikari anodhura uye inokonzera kusvibiswa kushoma kwezvakatipoteredza, zvichiita kuti ive tekinoroji iri kubuda mumunda wekuchenesa wafer.
4. Midziyo Yekuchenesa Wafer
Kuti zvive nechokwadi chekuti nzira dzekuchenesa wafer dzinoshanda zvakanaka uye dzakachengeteka, michina yakasiyana-siyana yekuchenesa yepamusoro inoshandiswa mukugadzira semiconductor. Mhando huru dzinosanganisira:
1. Midziyo Yekuchenesa Nemvura
Midziyo yekuchenesa yakanyorova inosanganisira matangi akasiyana-siyana ekunyudza, matangi ekuchenesa e ultrasonic, uye ma spin dryers. Midziyo iyi inosanganisa masimba emakanika uye ma reagents emakemikari kubvisa tsvina pamusoro pe wafer. Matangi ekunyudza anowanzo kuve nehurongwa hwekudzora tembiricha kuti ave nechokwadi chekugadzikana uye kushanda kwemhinduro dzemakemikari.
2. Midziyo Yekuchenesa Nekuoma
Midziyo yekuchenesa isina kuomeswa inonyanya kusanganisira michina yekuchenesa plasma, iyo inoshandisa zvidimbu zvine simba guru muplasma kuti iite pamwe nekubvisa zvasara kubva pamusoro pewafer. Kuchenesa plasma kwakakodzera zvakanyanya kune maitiro anoda kuchengetedza kusimba kwenzvimbo pasina kuisa zvasara zvemakemikari.
3. Masisitimu Ekuchenesa Ega
Nekuwedzera kuri kuramba kuchiitwa kwekugadzirwa kwemasemiconductor, masisitimu ekuchenesa otomatiki ave sarudzo inofarirwa yekuchenesa mawafer akawanda. Masisitimu aya anowanzo sanganisira michina yekufambisa otomatiki, masisitimu ekuchenesa matangi akawanda, uye masisitimu ekudzora nemazvo kuti ive nechokwadi chekuti wafer yega yega inobuda zvakanaka.
5. Mafambiro Emangwana
Sezvo michina ye semiconductor ichiramba ichiderera, tekinoroji yekuchenesa wafer iri kushanduka ichienda kune mhinduro dzinoshanda uye dzisingakuvadzi nharaunda. Matekinoroji ekuchenesa emangwana achatarisa pane zvinotevera:
Kubvisa Zvidimbu zveSub-nanometer: Matekinoroji aripo ekuchenesa anogona kubata zvidimbu zvenanometer, asi nekudzikira kwehukuru hwemudziyo, kubvisa zvidimbu zvesub-nanometer kuchava dambudziko idzva.
Kuchenesa Zvakasvibira uye Zvisingakuvadzi Nzvimbo: Kuderedza kushandiswa kwemakemikari anokuvadza nharaunda uye kugadzira nzira dzekuchenesa dzinochengetedza nharaunda, dzakadai sekuchenesa ozone uye kuchenesa megasonic, zvichave zvakakosha zvakanyanya.
Mazinga Epamusoro Ekushandisa Otomatiki Nehungwaru: Masisitimu ane hungwaru achaita kuti pave nekutarisa nekugadzirisa zvinhu zvakasiyana-siyana panguva yekuchenesa, zvichiwedzera kuvandudza kushanda kwekuchenesa uye kushanda zvakanaka kwekugadzira.
Tekinoroji yekuchenesa mawafer, sedanho rakakosha mukugadzira ma semiconductor, inoita basa rakakosha mukuona kuti nzvimbo dzewafer dzakachena dzekuita zvinotevera. Kusanganiswa kwenzira dzakasiyana dzekuchenesa kunobvisa tsvina zvinobudirira, zvichiita kuti nzvimbo ye substrate ive yakachena pamatanho anotevera. Sezvo tekinoroji ichifambira mberi, maitiro ekuchenesa acharamba achigadziriswa kuti asvike pazvinodiwa zvekugadzirisa kwakanyatsojeka uye kuderedza zvikanganiso mukugadzira ma semiconductor.
Nguva yekutumira: Gumiguru-08-2024