Kupesana nekumashure kweiyo AI shanduko, magirazi eAR ari kupinda zvishoma nezvishoma mukuziva kweveruzhinji. Separadigm inosanganisa zvisingaite uye nyika chaiyo, magirazi eAR anosiyana kubva kuVR zvishandiso nekubvumira vashandisi kuona ese ari maviri emifananidzo akafungidzirwa uye ambient mwenje nharaunda panguva imwe chete. Kuti uite izvi zviviri zvinoshanda - projekiti microdisplay mifananidzo mumaziso uchichengetedza kunze kwechiedza kutapurirana-optical-giredhi silicon carbide (SiC) -based AR magirazi anoshandisa waveguide (lightguide) architecture. Iyi dhizaini inokwirisa yakazara yemukati kuratidza kufambisa mifananidzo, yakafanana kune optical fiber kutapurirana, sezvakaratidzwa mudhiyabhorosi dhiyagiramu.
Kazhinji, imwe 6-inch high-purity semi-insulating substrate inogona kupa 2 peya dzemagirazi, nepo 8-inch substrate inotora 3-4 peya. Kugamuchirwa kwezvinhu zveSiC kunopa matatu akakosha mabhenefiti:
- Exceptional refractive index (2.7): Inogonesa >80° yakazara-ruvara nzvimbo yekuona (FOV) ine imwe lenzi layer, inobvisa zvinhu zvemurarabungu zvakajairika mumagadzirirwo eAR.
- Yakabatanidzwa tri-ruvara (RGB) waveguide: Inotsiva akawanda-layer waveguide stacks, kuderedza saizi yemuchina uye uremu.
- Superior thermal conductivity (490 W/m·K): Inoderedza kupisa kuunganidza-induced optical degradation.
Izvi zvakakodzera zvakafambisa kudiwa kwemusika kwakasimba kweSiC-based AR magirazi. Iyo optical-giredhi SiC inoshandiswa kazhinji ine yakakwira-purity semi-insulating (HPSI) makristasi, ayo ane kuomesesa kwegadziriro zvinodiwa anobatsira kudhura kwazvino. Nekuda kweizvozvo, kuvandudzwa kweHPSI SiC substrates kwakakosha.
1. Synthesis yeSemi-Insulating SiC Powder
Kugadzirwa kwemaindasitiri-chikero kunonyanya kushandisa yakakwirira-tembiricha yekuzviparidzira synthesis (SHS), maitiro anoda kudzora zvine hungwaru:
- Raw materials: 99.999% pure carbon/silicon powders ine particle sizes ye10–100 μm.
- Crucible kuchena: Zvikamu zvegraphite zvinowana kucheneswa kwepamusoro-tembiricha kuderedza kusvibiswa kwesimbi.
- Atmosphere control: 6N-purity argon (ine-in-line purifiers) inodzvinyirira nitrogen incorporation; tsvaga HCl/H₂ magasi anogona kuunzwa kuti asvibise boroni makomisheni uye kuderedza nitrogen, kunyangwe H₂ kutarisisa kunoda optimization kudzivirira graphite corrosion.
- Equipment standards: Synthesis furnaces inofanirwa kuwana <10⁻⁴ Pa base vacuum, ine hurongwa hwekutarisa kuvuza.
2. Matambudziko Ekukura kweCrystal
HPSI SiC kukura inogovera zvakafanana kuchena zvinodiwa:
- Feedstock: 6N+-purity SiC poda ine B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O pazasi pemiganho, uye simbi shoma dzealkali (Na/K).
- Gasi masisitimu: 6N argon / hydrogen blends inosimudzira kuramba.
- Zvishandiso: Molecular pumps inovimbisa ultrahigh vacuum (<10⁻⁶ Pa); crucible pre-treatment uye nitrogen kuchenesa kwakakosha.
Substrate Processing Innovations
Kuenzaniswa nesilicon, SiC's kureba kwekukura kutenderera uye inherent kushushikana (kukonzera kutsemuka / kumucheto chipping) kunoda kugadzirwa kwepamberi:
- Laser slicing: Kunowedzera goho kubva pa30 wafers (350 μm, wire saw) kusvika> 50 wafers pa20-mm boule, ine mukana we200-μm kutetepa. Nguva yekugadzira inodonha kubva ku10-15 mazuva (waya saw) kusvika <20 min/wafer ye8-inch crystals.
3. Indasitiri Kudyidzana
Meta's Orion timu yakapayona optical-giredhi SiC waveguide adoption, ichikurudzira R&D investments. Kudyidzana kwakakosha kunosanganisira:
- TankeBlue & MUDI Micro: Kuvandudzwa kwakabatana kweAR diffractive waveguide lenses.
- Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Strategic mubatanidzwa weAI/AR yekugovera ketani yekubatanidza.
Misika inofungidzira 500,000 SiC-yakavakirwa AR mayunitsi pagore ne2027, ichidya mazana maviri nemakumi mashanu emakumi matanhatu inch (kana 125,000 8-inch) substrates. Iyi trajectory inosimbisa basa reSiC rekushandura mune inotevera-chizvarwa AR optics.
XKH inyanzvi mukupa emhando yepamusoro 4H-semi-insulating (4H-SEMI) SiC substrates ine customizable madhayamita kubva pa2-inch kusvika 8-inch, akagadzirirwa kusangana nezvinodiwa zvekushandisa muRF, magetsi emagetsi, uye AR/VR optics. Masimba edu anosanganisira yakavimbika vhoriyamu kupihwa, kurongeka kwakaringana (ukobvu, kutaridzika, kupera kwepamusoro), uye yakazara-mu-mumba kugadzirisa kubva pakukura kwekristaro kusvika pakupenya. Kupfuura 4H-SEMI, tinopawo 4H-N-mhando, 4H/6H-P-mhando, uye 3C-SiC substrates, inotsigira akasiyana semiconductor uye optoelectronic innovations.
Nguva yekutumira: Aug-08-2025