Zvichienderana nekuchinja kweAI, magirazi eAR ari kupinda muruzivo rweveruzhinji zvishoma nezvishoma. Senzira inosanganisa zviri nyore nyika dzepaindaneti nedzechokwadi, magirazi eAR akasiyana nemidziyo yeVR nekubvumira vashandisi kuona mifananidzo yakarongwa nedhijitari uye chiedza chezvakatipoteredza panguva imwe chete. Kuti vawane mashandiro maviri aya—kuburitsa mifananidzo ye microdisplay mumaziso uku vachichengetedza kutumirwa kwechiedza chekunze—magirazi eAR akavakirwa pa optical-grade silicon carbide (SiC) anoshandisa dhizaini ye waveguide (lightguide). Dhizaini iyi inoshandisa kuratidzwa kwemukati kwese kutumira mifananidzo, yakafanana ne optical fiber transmission, sezvakaratidzwa mu schematic diagram.
Kazhinji, substrate imwe chete ye6-inch high-purity semi-insulating inogona kubereka magirazi maviri, nepo substrate ye8-inch ichikwanisa kubereka magirazi matatu kusvika mana. Kushandiswa kwezvinhu zveSiC kunopa mabhenefiti matatu akakosha:
- Exceptional refractive index (2.7): Inogonesa >80° full-color field of view (FOV) ne lenzi imwe chete, ichibvisa zvinhu zvemuraraungu zvinowanikwa mumagadzirirwo eAR echinyakare.
- Integrated tri-color (RGB) waveguide: Inotsiva multi-layer waveguide stacks, ichideredza saizi nehuremu hwemudziyo.
- Kupisa kwakanyanya (490 W/m·K): Kunoderedza kuora kwemaziso kunokonzerwa nekuunganidzwa kwekupisa.
Izvi zvakanakira zvakaita kuti pave nekudiwa kukuru kwegirazi reSiC-based AR. SiC inoshandiswa ne optical-grade inowanzo shandiswa ine makristaro eHPSI (high-purity semi-insulating crystals), ayo anodiwa zvakanyanya pakugadzira anowedzera mitengo yakakwira pari zvino. Nekuda kweizvozvo, kugadzirwa kweHPSI SiC substrates kwakakosha.
1. Kugadzirwa kweSemi-Insulating SiC Powder
Kugadzirwa kwemaindasitiri kunonyanya kushandisa kugadzirwa kwezvinogadzira zvinopisa zvakanyanya (SHS), maitiro anoda kudzorwa kwakanyatsonaka:
- Zvinhu zvisina kugadzirwa: 99.999% upfu hwekabhoni/silicon hwakachena hune saizi yezvikamu zve10–100 μm.
- Kuchena kweChipfuva: Zvikamu zveGraphite zvinonatswa nekupisa kwakanyanya kuderedza kupararira kwetsvina yesimbi.
- Kudzora mhepo: 6N-purity argon (ine zvinochenesa zviri mumutsara) inodzivisa kubatanidzwa kwenitrogen; magasi eHCl/H₂ anogona kuiswa kuti aite kuti boron compounds iparare uye aderedze nitrogen, kunyange hazvo huwandu hweH₂ huchida kugadziriswa kudzivirira graphite corrosion.
- Mitemo yemidziyo: Mafuro ekugadzira anofanira kusvika pasi pe10⁻⁴ Pa base vacuum, aine maprotocol akasimba ekutarisa kubuda kwemvura.
2. Matambudziko Ekukura Kwemakristaro
Kukura kweHPSI SiC kune zvinodiwa zvakafanana zvekuchena:
- Zvekudya: 6N+-purity SiC powder ine B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O iri pasi pemiganhu yemuganho, uye simbi shoma dzealkali (Na/K).
- Masisitimu egasi: 6N argon/hydrogen blends inowedzera resistivity.
- Zvishandiso: Mapombi eMolecular anoona kuti vacuum yakakwira zvakanyanya (<10⁻⁶ Pa); kurapwa kwekutanga kwecrucible uye kuchenesa nitrogen zvakakosha.
2.1 Kugadzira Zvitsva muSubstrate
Zvichienzaniswa nesilicon, kukura kwenguva refu kweSiC uye kushushikana kwazvinoita (zvichikonzera kutsemuka/kupwanyika kwemucheto) zvinoda kugadziriswa kwepamusoro:
- Kucheka neLaser: Kunowedzera goho kubva pamawafers makumi matatu (350 μm, waya yekucheka) kusvika kumawafers anopfuura makumi mashanu paboule re20-mm, zvichikonzera kutetepa kwe200-μm. Nguva yekugadzira inoderera kubva pamazuva gumi kusvika gumi nemashanu (waya yekucheka) kusvika pasi pemaminitsi makumi maviri pawafers dzemakristaro e8-inch.
3. Kushandira pamwe kweindasitiri
Chikwata cheMeta cheOrion chakatanga kushandisa SiC waveguide, zvikaita kuti pave nekudyara mari muR&D. Kudyidzana kwakakosha kunosanganisira:
- TankeBlue & MUDI Micro: Kugadzirwa kwemalenzi eAR diffractive waveguide pamwe chete.
- Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Mubatanidzwa wezvemagadzirirwo ekubatanidza AI/AR supply chain.
Zvinofungidzirwa kuti musika unofungidzira kuti mayuniti eAR akavakirwa paSiC anosvika zviuru zvishanu pagore panosvika gore ra2027, achishandisa ma substrate mazana maviri nemakumi mashanu e6-inch (kana zviuru zana nemakumi maviri nemashanu zve8-inch). Nzira iyi inoratidza basa reSiC rekushandura mu AR optics yechizvarwa chinotevera.
XKH inonyanya kupa 4H-semi-insulating substrates dzemhando yepamusoro (4H-SEMI) SiC substrates dzine dhayamita dzinogadziriswa dzinotangira pa2-inch kusvika 8-inch, dzakagadzirirwa kusangana nezvinodiwa zvekushandisa muRF, power electronics, uye AR/VR optics. Simba redu rinosanganisira kupa vhoriyamu yakavimbika, kugadzirisa kwakarurama (ukobvu, kurongeka, kupedzisa pamusoro), uye kugadzirisa kwakazara mukati kubva pakukura kwekristaro kusvika pakupukuta. Kupfuura 4H-SEMI, tinopawo 4H-N-type, 4H/6H-P-type, uye 3C-SiC substrates, tichitsigira hunyanzvi hwakasiyana-siyana hwe semiconductor uye optoelectronic.
Nguva yekutumira: Nyamavhuvhu-08-2025