Abstract:Takagadzira 1550 nm insulator-based lithium tantalate waveguide nekurasikirwa kwe0.28 dB / cm uye ring resonator quality factor ye 1.1 mamiriyoni. Iko kushandiswa kwe χ(3) kusava mutsara mune zvisiri mutsara mafotoni kwakadzidzwa. Zvakanakira zve lithium niobate pane insulator (LNoI), iyo inoratidza yakanakisa χ(2) uye χ(3) nonlinear zvivakwa pamwe nekuvharirwa kwakasimba kwemaziso nekuda kweiyo "insulator-on" chimiro, zvakakonzera kufambira mberi kwakakosha muwaveguide tekinoroji yeultrafast. modulators uye akabatanidzwa asina mutsara mafotonics [1-3]. Pamusoro peLN, lithium tantalate (LT) yakaongororwawo sechinhu chisina mutsara chefotonic. Kuenzaniswa neLN, LT ine yakakwirira yekukuvara kwechikumbaridzo uye yakafara optical transparency hwindo [4, 5], kunyangwe maparamita ayo ekuona, senge refractive index uye nonlinear coefficients, akafanana neayo eLN [6, 7]. Nekudaro, LToI inomira pachena seimwe yakasimba mumiriri zvinhu zvepamusoro optical simba nonlinear photonic application. Zvakare, LToI iri kuita chinhu chekutanga chepamusoro acoustic wave (SAW) mafirita zvishandiso, anoshanda mune yakakwirira-kumhanya nhare uye isina waya tekinoroji. Muchirevo chechinyorwa chino, LToI wafers anogona kuve akajairika zvinhu zvekushandisa photonic. Nekudaro, kusvika parizvino, mashoma mafotonic zvishandiso zvinoenderana neLToI zvakataurwa, senge microdisk resonators [8] uye electro-optic phase shifters [9]. Mubepa rino, tinopa yakaderera-kurasikirwa LToI waveguide uye mashandisirwo ayo mumhete resonator. Pamusoro pezvo, isu tinopa iyo χ(3) isina mutsara maitiro eLToI waveguide.
Zvinhu Zvikuru:
• Kupa 4-inch kusvika 6-inch LToI wafers, yakaonda-firimu lithium tantalate wafers, nepamusoro akaturikidzana ukobvu kubva 100 nm kusvika 1500 nm, utilizing mudzimba tekinoroji uye makura maitiro.
• SINOI: Ultra-yakaderera kurasikirwa nesilicon nitride yakaonda-firimu wafers.
• SICOI: High-purity semi-insulating silicon carbide thin-film substrates yesilicon carbide photonic integrated circuits.
• LTOI: Mukwikwidzi ane simba kune lithium niobate, yakaonda-firimu lithium tantalate wafers.
• LNOI: 8-inch LNOI inotsigira kugadzirwa kwakawanda kwezvakakura-zviyero zvakatetepa-firimu lithium niobate zvigadzirwa.
Kugadzira paIsulator Waveguides:Muchidzidzo ichi, takashandisa 4-inch LToI wafers. Iyo yepamusoro LT layer ndeyekutengesa 42 ° yakatenderedzwa Y-yakatemwa LT substrate yeSAW zvishandiso, iyo inosungirirwa zvakananga kune Si substrate ine 3 µm gobvu thermal oxide layer, ichishandisa yakangwara yekucheka maitiro. Mufananidzo 1(a) unoratidza maonero epamusoro eLToI wafer, nepamusoro LT layer ukobvu hwe200 nm. Takaongorora kushata kwepamusoro kweLT layer tichishandisa atomic force microscopy (AFM).
Mufananidzo 1.(a) Maonero epamusoro eiyo LToI wafer, (b) AFM mufananidzo wepamusoro weLT layer, (c) PFM mufananidzo wepamusoro weLT layer, (d) Schematic cross-section yeLToI waveguide, (e) Yakaverengerwa yakakosha TE modhi mbiri, uye (f) SEM mufananidzo weLToI waveguide musimboti pamberi peSiO2 pamusoro pekuisa. Sezvinoratidzwa mumufananidzo 1 (b), kushata kwepamusoro kuri pasi pe1 nm, uye hapana mitsetse yekukwenya yakaonekwa. Pamusoro pezvo, takaongorora mamiriro epolarization epamusoro LT layer tichishandisa piezoelectric response force microscopy (PFM), sezvinoratidzwa mumufananidzo 1 (c). Isu takasimbisa kuti yunifomu polarization yakachengetwa kunyangwe mushure mekubatana.
Tichishandisa iyi LToI substrate, takagadzira waveguide sezvinotevera. Chekutanga, simbi mask layer yakaiswa kune yakatevera yakaoma etching yeLT. Zvadaro, electron beam (EB) lithography yakaitwa kutsanangura waveguide musimboti pateni pamusoro pesimbi mask layer. Tevere, isu takatamisa iyo EB kuramba patani kune simbi mask layer kuburikidza neakaoma etching. Mushure meizvozvo, iyo LToI waveguide musimboti yakaumbwa ichishandisa electron cyclotron resonance (ECR) plasma etching. Pakupedzisira, iyo simbi mask layer yakabviswa kuburikidza nekunyorova maitiro, uye SiO2 overlayer yakaiswa uchishandisa plasma-inosimudzira kemikari vapor deposition. Mufananidzo 1 (d) inoratidza schematic muchinjiko-chikamu cheLToI waveguide. Hurefu hwakazara hwepakati, kureba kweplate, uye hupamhi hwepakati ndeye 200 nm, 100 nm, uye 1000 nm, zvichiteerana. Ziva kuti hupamhi hwepakati hunowedzera kusvika ku3 µm pamucheto we waveguide we optical fiber coupling.
Mufananidzo 1 (e) unoratidza yakaverengerwa optical intensity kugovera kweiyo yakakosha transverse yemagetsi (TE) modhi pa1550 nm. Mufananidzo 1 (f) inoratidza scanning electron maikorosikopu (SEM) mufananidzo weLToI waveguide core pamberi pekuiswa kweSiO2 overlayer.
Waveguide Hunhu:Takatanga kuongorora mutsara wekurasikirwa maitiro nekuisa TE-polarized mwenje kubva ku1550 nm wavelength yakakwidziridzwa yakangoerekana yabuda sosi muLToI waveguides yehurefu hwakasiyana. Kurasikirwa kwekuparadzira kwakawanikwa kubva pamateru ehukama pakati pehurefu hwewaveguide uye kutapurirana pawavelength yega yega. Iyo yakayerwa yekuparadzira kurasikirwa yaive 0.32, 0.28, uye 0.26 dB / cm pa1530, 1550, uye 1570 nm, zvichiteerana, sezvakaratidzwa mumufananidzo 2 (a). Iyo yakagadzirwa LToI waveguides yakaratidza yakaenzana-yakaderera-kurasikirwa kuita kune-ye-iyo-iyo-iyo LNoI waveguides [10].
Tevere, takaongorora iyo χ(3) isina mutsara kuburikidza newavelength shanduko inogadzirwa neina-wave kusanganisa maitiro. Isu tinoisa inoenderera wave wave pombi mwenje pa1550.0 nm uye chiratidzo chechiedza pa1550.6 nm mune 12 mm kureba waveguide. Sezvinoratidzwa mumufananidzo 2 (b), iyo phase-conjugate (idler) light wave signal intensity yakawedzera nekuwedzera simba rekuisa. Iyo inset muFigure 2 (b) inoratidza yakajairika kubuda spectrum yechina-wave kusanganiswa. Kubva paukama huri pakati pesimba rekuisa uye kushandura kushanda zvakanaka, takafungidzira kuti nonlinear parameter (γ) ingangoita 11 W ^ -1m.
Mufananidzo 3.(a) Microscope mufananidzo weyakagadzirwa ring resonator. (b) Kutapurirana spectra yemhete resonator ine akasiyana gap paramita. (c) Yakayerwa uye Lorentzian-yakakodzera transmission spectrum yeringi resonator ine gap re1000 nm.
Tevere, takagadzira LToI mhete resonator uye tikaongorora maitiro ayo. Mufananidzo 3 (a) unoratidza mufananidzo wemicroscope weiyo yakagadzirwa ring resonator. Ringi resonator inoratidzira "racetrack" kumisikidzwa, inosanganisira dunhu rakakomberedzwa rine radius ye100 µm uye nharaunda yakatwasuka ye100 µm pakureba. Iyo gap hupamhi pakati pemhete nebhasi waveguide core inosiyana mukuwedzera kwe200 nm, kunyanya pa800, 1000, uye 1200 nm. Mufananidzo 3 (b) unoratidza kutapurirana spectra kwegap rega rega, zvichiratidza kuti chiyero chekutsakatika chinoshanduka nehukuru hwegap. Kubva pazviratidziro izvi, takaona kuti iyo 1000 nm gap inopa dzinenge dzakakomba mamiriro ekubatanidza, sezvo ichiratidzira yakanyanya kutsakatika reshiyo ye -26 dB.
Tichishandisa resonator yakanyatsobatanidzwa, takafungidzira mhando yemhando (Q factor) nekukodzera iyo linear transmission spectrum neLorentzian curve, tichiwana yemukati Q factor ye1.1 miriyoni, sezvakaratidzwa muFigure 3 (c). Sekuziva kwedu, iyi ndiyo yekutanga ratidziro yewaveguide-yakabatana LToI mhete resonator. Zvinonyanya kukosha, iyo Q factor kukosha yatakawana yakanyanya kukwirira kupfuura iyo yefiber-yakabatana LToI microdisk resonators [9].
Mhedziso:Takagadzira LToI waveguide nekurasikirwa kwe0.28 dB / cm pa 1550 nm uye ring resonator Q factor ye 1.1 mamiriyoni. Kuita kwakawanikwa kunofananidzwa neiyo yepasi-ye-iyo-yakaderera-kurasikirwa LNoI waveguides. Pamusoro pezvo, isu takaongorora iyo χ(3) kusawirirana kweiyo yakagadzirwa LToI waveguide ye-on-chip isiri-linear application.
Nguva yekutumira: Nov-20-2024