Pfupiso:Tagadzira 1550 nm insulator-based lithium tantalate waveguide ine kurasikirwa kwe0.28 dB/cm uye ring resonator quality factor ye1.1 miriyoni. Kushandiswa kweχ(3) nonlinearity mu nonlinear photonics kwakadzidzwa. Mabhenefiti e lithium niobate pa insulator (LNoI), iyo inoratidza χ(2) uye χ(3) nonlinear properties pamwe chete ne strong optical confinement nekuda kwe "insulator-on" structure yayo, zvakatungamira mukufambira mberi kukuru mu waveguide technology ye ultrafast modulators uye integrated nonlinear photonics [1-3]. Kuwedzera ku LN, lithium tantalate (LT) yakaongororwawo sechinhu chisiri che photonic. Zvichienzaniswa ne LN, LT ine higher optical damage threshold uye wider optical transparency window [4, 5], kunyangwe ma optical parameters ayo, akadai se refractive index uye nonlinear coefficients, akafanana neaya e LN [6, 7]. Saka, LToI inoonekwa seimwe yemhando dzakakosha dzekushandisa maficha e photonic ane simba repamusoro. Uyezve, LToI iri kuva chinhu chikuru chekushandisa maficha e surface acoustic wave (SAW), anoshandiswa muhunyanzvi hwemafoni newaya dzinomhanya. Mumamiriro ezvinhu aya, mawafer eLToI anogona kunge ari zvinhu zvakajairika zvekushandisa maficha e photonic. Zvisinei, kusvika pari zvino, zvishandiso zvishoma zve photonic zvakavakirwa paLToI chete ndizvo zvataurwa, zvakaita se microdisk resonators [8] uye electro-optic phase shifters [9]. Mupepa rino, tinoratidza LToI waveguide ine kurasikirwa kwakaderera uye mashandisirwo ayo mu ring resonator. Pamusoro pezvo, tinopa hunhu hwe χ(3) husina kurongeka hweLToI waveguide.
Pfungwa huru:
• Inopa mawafer eLToI ane 4-inch kusvika 6-inch, mawafer eLithium Tantalate ane firimu rakatetepa, ane ukobvu hwepamusoro hunobva pa100 nm kusvika 1500 nm, achishandisa tekinoroji yemuno uye maitiro ekukura.
• SINOI: Mawafer esilicon nitride akatetepa anorasikirwa zvakanyanya.
• SICOI: Zvigadziko zvesilicon carbide zvakapfava zvakanyanya zvesimbi dzakatetepa dzesilicon carbide photonic integrated circuits.
• LTOI: Mukwikwidzi akasimba we lithium niobate, thin-film lithium tantalate wafers.
• LNOI: LNOI ye 8-inch inotsigira kugadzirwa kwakawanda kwezvigadzirwa zve lithium niobate zvemhando yepamusoro.
Kugadzira uchishandisa ma "Insulator Waveguides":Muchidzidzo ichi, takashandisa mawafer eLToI ane mainchi 4. Chigadziko chepamusoro cheLT isubstrate yeLT inotenderedzwa neY-cut ye42° yezvigadzirwa zveSAW, iyo yakabatana zvakananga kune substrate yeSi ine thermal oxide layer ine ukobvu hwe3 µm, ichishandisa nzira yekucheka yakangwara. Mufananidzo 1(a) unoratidza maonero epamusoro eLToI wafer, ine ukobvu hweLT layer yepamusoro hwe200 nm. Takaongorora kuomarara kwepamusoro peLT layer yepamusoro tichishandisa atomic force microscopy (AFM).
Mufananidzo 1.(a) Kuonekwa kwepamusoro kweLToI wafer, (b) Mufananidzo weAFM wepamusoro peLT layer yepamusoro, (c) Mufananidzo wePFM wepamusoro peLT layer yepamusoro, (d) Schematic cross-section yeLToI waveguide, (e) Calculated fundamental TE mode profile, uye (f) Mufananidzo weSEM weLToI waveguide core isati yaiswa pamusoro peSiO2. Sezvakaratidzwa muMufananidzo 1 (b), roughness yekumusoro iri pasi pe1 nm, uye hapana mitsetse yekukwenya yakaonekwa. Pamusoro pezvo, takaongorora mamiriro epolarization yeLT layer yepamusoro tichishandisa piezoelectric response force microscopy (PFM), sezvakaratidzwa muMufananidzo 1 (c). Takasimbisa kuti polarization yakafanana yakaramba iripo kunyangwe mushure mekuita kwekubatanidza.
Tichishandisa iyi LToI substrate, takagadzira waveguide seizvi. Kutanga, simbi mask layer yakaiswa kuti iome LT. Zvadaro, electron beam (EB) lithography yakaitwa kuti itsanangure waveguide core pattern iri pamusoro pe metal mask layer. Tevere, takatamisa EB resist pattern kuenda ku metal mask layer kuburikidza ne dry etching. Mushure mezvo, LToI waveguide core yakagadzirwa uchishandisa electron cyclotron resonance (ECR) plasma etching. Pakupedzisira, metal mask layer yakabviswa kuburikidza ne wet process, uye SiO2 overlayer yakaiswa uchishandisa plasma-enhanced chemical vapor deposition. Mufananidzo 1 (d) unoratidza schematic cross-section yeLToI waveguide. Kureba kwese kwe core, plate height, uye core width i200 nm, 100 nm, uye 1000 nm, zvichiteerana. Cherechedza kuti core width inowedzera kusvika 3 µm pamucheto we waveguide we optical fiber coupling.
Mufananidzo 1 (e) unoratidza kugoverwa kwesimba remagetsi kwakaverengerwa kwe fundamental transverse electric (TE) mode pa 1550 nm. Mufananidzo 1 (f) unoratidza mufananidzo we scanning electron microscope (SEM) weLToI waveguide core usati waiswa pamusoro peSiO2 overlayer.
Hunhu hweWaveguide:Takatanga taongorora hunhu hwekurasikirwa kwemutsara nekuisa chiedza cheTE-polarized kubva ku1550 nm wavelength amplified spontaneous emission source muLToI waveguides dzine hurefu hwakasiyana. Kurasikirwa kwekupararira kwakawanikwa kubva pakutsetseka kwehukama huripo pakati pehurefu hwewaveguides nekutumira pawavelength yega yega. Kurasikirwa kwekupararira kwakayerwa kwaive 0.32, 0.28, uye 0.26 dB/cm pa1530, 1550, uye 1570 nm, zvichiteerana, sezvakaratidzwa muMufananidzo 2 (a). MaLToI waveguides akagadzirwa akaratidza kushanda kwakaderera kwakafanana nemaLNoI waveguides emazuva ano [10].
Tevere, takaongorora kusawirirana kwe χ(3) kuburikidza nekushandurwa kwewavelength kunogadzirwa nemaitiro ekusanganisa mawave mana. Takaisa mwenje wepombi yewave inoenderera mberi pa1550.0 nm uye mwenje wesignal pa1550.6 nm mugwara rewave refu re 12 mm. Sezvakaratidzwa muMufananidzo 2 (b), simba rewave ye phase-conjugate (idler) yakawedzera nekuwedzera kwesimba rekupinda. Chinyorwa chiri muMufananidzo 2 (b) chinoratidza frequency yakajairika yekusanganiswa kwemawave mana. Kubva pahukama huripo pakati pesimba rekupinda nekushanda kwekushandura, takafungidzira kuti parameter isina kuenzana (γ) inenge 11 W^-1m.
Mufananidzo 3.(a) Mufananidzo wemaikorosikopu weringi yakagadzirwa. (b) Maspectra ekutumira eringi ine maparamita akasiyana-siyana emukana. (c) Maspectra ekutumira akayerwa uye akagadzirwa neLorentzian eringi ine mukana we1000 nm.
Tevere, takagadzira LToI ring resonator ndokuongorora hunhu hwayo. Mufananidzo 3 (a) unoratidza mufananidzo we optical microscope we ring resonator yakagadzirwa. Ring resonator ine "racetrack" configuration, ine nzvimbo yakakombama ine radius ye100 µm uye nzvimbo yakatwasuka ye100 µm muhurefu. Upamhi hwegap pakati pe ring nebus waveguide core hunosiyana mukuwedzera kwe200 nm, kunyanya pa800, 1000, uye 1200 nm. Mufananidzo 3 (b) unoratidza transmission spectra yegap rega rega, zvichiratidza kuti extinction ratio inochinja nehukuru hwegap. Kubva kuma spectra aya, takaona kuti 1000 nm gap inopa mamiriro ekubatanidza akakosha, sezvo ichiratidza extinction ratio yepamusoro ye -26 dB.
Tichishandisa resonator yakabatana zvine hungwaru, takafungidzira hunhu hwechinhu (Q factor) nekuisa linear transmission spectrum neLorentzian curve, tichiwana Q factor yemukati ye1.1 miriyoni, sezvakaratidzwa muMufananidzo 3 (c). Sekuziva kwedu, uku ndiko kuratidzwa kwekutanga kwewaveguide-coupled LToI ring resonator. Zvinonyanya kukosha kuti kukosha kweQ factor kwatakawana kwakanyanya kupfuura kwefiber-coupled LToI microdisk resonators [9].
Mhedziso:Takagadzira LToI waveguide ine kurasikirwa kwe0.28 dB/cm pa1550 nm uye ring resonator Q factor ye1.1 miriyoni. Kushanda kwakawanikwa kwakafanana nekwema LNoI waveguides emazuva ano ane kurasikirwa kushoma. Pamusoro pezvo, takaongorora χ(3) kusawirirana kweLToI waveguide yakagadzirwa yekushandiswa kwe on-chip nonlinear.
Nguva yekutumira: Mbudzi-20-2024