Chii chinonzi TGV?
TGV, (Kuburikidza neGirazi kuburikidza), tekinoroji yekugadzira maburi anoburitswa negirazi, Muchidimbu, TGV chivakwa chakareba chinoboora, chinozadza uye chinobatanidza kumusoro nekudzika kwegirazi kuti chigadzire macircuit akabatanidzwa pasi pegirazi. Iyi tekinoroji inoonekwa se tekinoroji yakakosha yechizvarwa chinotevera chekurongedza kwe3D.
Ndezvipi zvinhu zvine chekuita neTGV?
1. Maumbirwo: TGV inzira inopinza inopinda nepakati pegomba rakagadzirwa pagirazi. Nekuisa jira resimbi rinofambisa pamadziro eburi, zvikamu zvepamusoro nepazasi zvezviratidzo zvemagetsi zvakabatana.
2. Maitiro ekugadzira: Kugadzira TGV kunosanganisira kugadzirisa substrate, kugadzira maburi, kuisa simbi muzvikamu, kuzadza maburi uye matanho ekutatamura. Nzira dzakajairika dzekugadzira dzinosanganisira kucheka nemakemikari, kuboora nelaser, electroplating nezvimwewo.
3. Zvakanakira zvekushandisa: Kana tichienzanisa nesimbi yechinyakare inopinda nepaburi, TGV ine zvakanakira zvehukuru hudiki, kuwanda kwewaya, kushanda kuri nani kwekupisa nezvimwewo. Inoshandiswa zvakanyanya mu microelectronics, optoelectronics, MEMS nedzimwe nzvimbo dzekubatanidza kwakasimba.
4. Mafambiro ebudiriro: Nekuvandudzwa kwezvigadzirwa zvemagetsi zvichienda kukuita kuti zvive zvishoma uye kubatanidzwa kwakanyanya, tekinoroji yeTGV iri kugamuchira kutariswa nekushandiswa kwakawanda. Mune ramangwana, maitiro ayo ekugadzira acharamba achivandudzwa, uye saizi yayo nekushanda kwayo zvicharamba zvichivandudzika.
Chii chinonzi maitiro eTGV:
1. Kugadzira girazi repasi (a): Gadzirira girazi repasi pakutanga kuti uve nechokwadi chekuti pamusoro paro pakachena uye pakanyatsonaka.
2. Kuboorwa kwegirazi (b): Laser inoshandiswa kugadzira gomba rinopinda mugirazi. Chimiro chegomba chinowanzova chakaita sedenderedzwa, uye mushure mekurapwa ne laser kune rimwe divi, rinotenderedzwa uye rinogadziriswa kune rimwe divi.
3. Kugadzira simbi pamadziro emaburi (c): Kugadzira simbi kunoitwa pamadziro emaburi, kazhinji kuburikidza nePVD, CVD nedzimwe nzira dzekugadzira simbi inofambisa mvura pamadziro emaburi, senge Ti/Cu, Cr/Cu, nezvimwewo.
4. Lithography (d): Pamusoro pegirazi substrate pakaputirwa ne photoresist uye patterned. Ratidza zvikamu zvisingade plating, kuitira kuti zvikamu zvinoda plating chete ndizvo zvinobuda pachena.
5. Kuzadza maburi (e): Kuisa mhangura nemagetsi kuti girazi rizadze nemaburi kuti pave nenzira yakakwana inofambisa mvura. Kazhinji zvinodiwa kuti gomba rizadzwe zvachose pasina maburi. Cherechedza kuti Cu iri mudhayagiramu haina kuzadzwa zvizere.
6. Nzvimbo yakati sandara ye substrate (f): Mamwe maitiro eTGV anoita kuti pamusoro pe substrate yegirazi rakazara pave nechokwadi chekuti pamusoro pe substrate pave pakanaka, izvo zvinobatsira pamatanho anotevera ekuita.
7. Chidziviriro chechikamu nekubatanidza kwekupedzisira (g): Chikamu chekudzivirira (senge polyimide) chinoumbwa pamusoro pegirazi.
Muchidimbu, nhanho imwe neimwe yeTGV process yakakosha uye inoda kudzorwa kwakanyatsojeka uye kugadziriswa. Parizvino tinopa tekinoroji yeTGV girazi rinopinda nepaburi kana zvichidikanwa. Ndapota inzwa wakasununguka kutibata!
(Mashoko ari pamusoro apa anobva paInternet, achivharirwa)
Nguva yekutumira: Chikumi-25-2024