Pfupiso Yakakwana yeMatekiniki eKuisa Mafirimu Matete: MOCVD, Magnetron Sputtering, uye PECVD

Mukugadzira ma semiconductor, nepo photolithography uye etching zviri izvo zvinonyanya kutaurwa, matekiniki epitaxial kana thin film deposition akakosha zvakaenzana. Chinyorwa chino chinosuma nzira dzinoverengeka dzinoshandiswa mukugadzira machip, kusanganisiraMOCVD, magnetron sputteringuyePECVD.

Sei Maitiro Emafirimu Matete Akakosha Mukugadzira Machipisi?

Semuenzaniso, fungidzira chingwa chakabikwa chisina kubikwa. Chega, chinogona kunakirwa chisina kunaka. Zvisinei, nekukwesha pamusoro nemasosi akasiyana-siyana—senge bhinzi inonaka kana sweet malt syrup—unogona kushandura zvachose kunaka kwayo. Mapendi aya anowedzera kunaka akafanana nemafirimu matetemumaitiro e semiconductor, nepo flatbread pachayo ichimiririrapasita.

Mukugadzira machip, mafirimu matete ane mabasa akawanda anoshanda—kudzivirira kupisa, kufambisa mhepo, kupfavisa chiedza, nezvimwewo—uye basa rega rega rinoda nzira chaiyo yekuisa chiedza.

1. Kubviswa kweUtsi hweMeta-Organic Chemical (MOCVD)

MOCVD inzira yepamusoro-soro uye yakanyatsojeka inoshandiswa pakuisa mafirimu emhando yepamusoro e semiconductor thin films uye nanostructures. Inoita basa guru mukugadzirwa kwemidziyo yakaita se LEDs, lasers, uye power electronics.

Zvikamu Zvikuru zveMOCVD System:

• Sisitimu Yokutumira Gasi
  Ane basa rekuisa reactants mukamuri re reaction nemazvo. Izvi zvinosanganisira kudzora kuyerera kwe:

• Magasi anotakura zvinhu

• Zvinhu zvinotangira simbi-organic

• Magasi eHydride
  Sisitimu iyi ine mavharuvhu ane nzira dzakawanda dzekuchinja pakati penzira dzekukura nedzekuchenesa.

• Imba yeKupindura
  Mwoyo wehurongwa uhwo kukura kwezvinhu kunoitika. Zvinhu zvinosanganisira:

  • Graphite susceptor (substrate holder)

  • Zvinonzwa zvekupisa uye tembiricha

  • Machiteshi ekuona ekutarisa ari panzvimbo

  • Maoko erobhoti ekutakura/kuburitsa wafer otomatiki

• Sisitimu Yekudzora Kukura
  Ine ma programmable logic controllers pamwe ne computer inochengetedza ruzivo. Izvi zvinoita kuti pave nekuongororwa kwakarurama uye kudzokorora kwese kwakaitwa.

• Kutarisa Vari Pachavo
  Zvishandiso zvakaita sema pyrometers nema reflectometers zvinoyera:

  • Ukobvu hwefirimu

  • Tembiricha yepamusoro

  • Kukombama kwepasi pevhu
    Izvi zvinogonesa mhinduro uye kugadzirisa panguva chaiyo.

• Sisitimu Yekurapa Utsi
  Inorapa zvinhu zvine chepfu uchishandisa kupisa kana makemikari kuti ive nechokwadi chekuti zvinhu zvakachengeteka uye zvinoenderana nezvakatipoteredza.

Kugadziriswa kweShowerhead Yakabatana (CCS) Yakavharwa:

Muma MOCVD reactors akamira, dhizaini yeCCS inobvumira magasi kuti apinzwe zvakaenzana kuburikidza nema nozzles anochinjana muchimiro cheshawa. Izvi zvinoderedza mafambiro enguva isati yakwana uye zvinowedzera kusanganiswa kwakafanana.

• Iyogirafiti inotendererazvinobatsirawo kuita kuti gasi rive rakafanana, zvichivandudza kufanana kwefirimu muwafer.

2. Kushambadzira kweMagnetron

Magnetron sputtering inzira yekuisa vapor (PVD) inoshandiswa zvakanyanya pakuisa mafirimu matete uye machira, kunyanya mumagetsi, optics, uye ceramics.

Nheyo yekushanda:

1. Zvinhu Zvakanangana
   Chinhu chinofanira kuiswa—simbi, oxide, nitride, nezvimwewo—chakasungirirwa pa cathode.

2. Kamuri reVacuum
   Maitiro acho anoitwa pasi pemvura yakawanda inotonhorera kuti isasvibiswe.

3. Kugadzirwa kwePlasma
   Gasi risina simba, rinowanzova argon, rinoitwa ionized kuti rigadzire plasma.

4. Kushandiswa kweMagineti Munda
   Simba remagineti rinovhara maerekitironi pedyo nechinotsvagwa kuti riwedzere kushanda zvakanaka kweionization.

5. Maitiro Ekubvisa Manyoka
   MaIon anorwisa chinangwa, achiburitsa maatomu anofamba nemukamuri obva anyura pasi pevhu.

Mabhenefiti eMagnetron Sputtering:

• Kuiswa kwemafirimu akafananamunzvimbo dzakakura.

• Kukwanisa Kuisa Makomponi Akaoma, kusanganisira alloys uye ceramics.

• Magadzirirwo Ekugadzirisa Anogadziriswakuti unyatso tarisa ukobvu, maumbirwo, uye magadzirirwo emukati memuviri.

• Hunhu Hwepamusoro hweMafirimuine kunamira kwakasimba uye simba remakanika.

• Kuenderana Kwezvinhu Zvakakura, kubva kusimbi kusvika kuma oxides nema nitrides.

• Kushanda Pakupisa Kushoma, yakakodzera nzvimbo dzinoshandiswa pakupisa.

3. Kubviswa kwePlasma-Enhanced Chemical Vapor Deposition (PECVD)

PECVD inoshandiswa zvakanyanya pakuburitsa mafirimu matete akadai sesilicon nitride (SiNx), silicon dioxide (SiO₂), uye amorphous silicon.

Nheyo:

Muchirongwa chePECVD, magasi epamberi anounzwa mukamuri re vacuum ukoplasma inoburitsa kupenyainogadzirwa uchishandisa:

• Kukurudza kweRF

• DC yakakwira voltage

• Microwave kana manyuko emhepo

Plasma inomutsa mashandiro egasi, ichigadzira mhando dzinoita reactive dzinogara pasi kuti dzigadzire firimu rakatetepa.

Matanho Ekuisa Mari:

1. Kuumbwa kwePlasma
   Magasi epamberi anofadzwa nemagetsi, uye anoumba ma "reactive radicals" nema "ion".

2. Maitiro uye Kutakura
   Mhando idzi dzinosangana nekuchinja kwechipiri padzinofamba dzichienda kune substrate.

3. Maitiro Epamusoro
   Pavanosvika pasi pevhu, vanosveta, vanopindura, uye vanoumba firimu rakasimba. Zvimwe zvinobuda zvinoburitswa semagasi.

Mabhenefiti ePECVD:

• Kufanana Kwakanaka Kwazvomukugadzirwa kwefirimu uye ukobvu.

• Kunamatira Kwakasimbakunyangwe patembiricha yakaderera yekuisa.

• Mitengo Yakakwirira Yekubvisa Mari, zvichiita kuti ive yakakodzera kugadzirwa kwemaindasitiri.

4. Maitiro Ekugadzira Mafirimu Matete

Kunzwisisa hunhu hwemafirimu matete kwakakosha pakudzora hunhu. Nzira dzakajairika dzinosanganisira:

(1) Kuparadzaniswa kweX-ray (XRD)

• Chinangwa: Ongorora maumbirwo ekristaro, ma "lattice constants", uye marongerwo azvo.

• Nheyo: Zvichibva paMutemo waBragg, zvinoyera kuti maX-ray anopararira sei kuburikidza nechinhu chakagadzirwa nekristaro.

• Mashandisirwo: Crystallography, kuongorora chikamu, kuyerwa kwekusvuta, uye kuongororwa kweganda rakatetepa.

(2) Kuskena Electron Microscopy (SEM)

• Chinangwa: Tarisa chimiro chepamusoro uye chimiro che microstructure.

• Nheyo: Inoshandisa danda remaerekitironi kuongorora pamusoro pemuenzaniso. Zviratidzo zvakaonekwa (semuenzaniso, maerekitironi echipiri uye akapararira kumashure) zvinoratidza ruzivo rwepamusoro.

• Mashandisirwo: Sainzi yezvinhu, nanotech, biology, uye kuongorora kukundikana.

(3) Microscopy yeSimba reAtomu (AFM)

• Chinangwa: Nzvimbo dzemifananidzo dziri paatomu kana nanometer resolution.

• Nheyo: Chinoongorora chakapinza chinoongorora pamusoro pechinhu uku chichichengetedza simba rekubatana nguva dzose; kutenderera kwakamira kunoita kuti pave ne3D topography.

• Mashandisirwo: Kutsvaga kweNanostructure, kuyerwa kwekuoma kwenzvimbo, zvidzidzo zve biomolecular.