Zviri Mukati
1.Pfupiso uye Mabasa Makuru eFOUP
2.Mamiriro uye Magadzirirwo eFOUP
3. Nhungamiro dzeFOUP dzekuronga uye kushandisa
4. Mashandiro uye Kukosha kweFOUP muKugadzira Semiconductor
5.Matambudziko Ehunyanzvi uye Maitiro Ekuvandudza Remangwana
6.XKH's Solutions Customized and Service Support
Mukugadzirwa kwemasemiconductor, Front Opening Unified Pod (FOUP) mudziyo unokosha unoshandiswa kuchengetedza, kutakura, uye kuchengeta mawafer. Mukati mayo munogona kugara zvidimbu makumi maviri nezvishanu zvemawafer e300mm, uye zvikamu zvayo zvikuru zvinosanganisira mudziyo wekuvhura pamberi uye furemu yemusuwo yakagadzirirwa kuvhura nekuvhara. FOUP inotakura zvinhu zvikuru mu automated transport system mukati me12inch wafer fabs. Inowanzo fambiswa yakavharwa uye inongovhurwa chete kana yasundirwa kuchiteshi chekuisa zvinhu, zvichibvumira mawafer kutamiswa kuenda kunzvimbo yekuisa zvinhu mumidziyo.
Dhizaini yeFOUP yakagadzirirwa zvinodiwa nenzvimbo diki. Ine mipata kumashure yekuisa wafer, uye chivharo chakagadzirirwa zvakananga kuti chienderane nechinovhara cheopener. Marobhoti anobata wafer anoshanda munzvimbo yakachena yeClass 1, zvichiita kuti wafers dzisasvibiswe panguva yekutumira. Uyezve, FOUP inofambiswa pakati pezvishandiso zvekugadzirisa kuburikidza ne automated material handling system (AMHS). Ma wafer fabs emazuva ano anonyanya kushandisa overhead rail systems pakufambisa, nepo mamwe ma wafers ekare anogona kushandisa ground-based automated guided vehicles (AGVs).
FOUP haingogonese chete kutamiswa kwemawafer otomatiki asiwo inoshanda basa rekuchengetera. Nekuda kwematanho akawanda ekugadzira, mawafer anogona kutora mwedzi yakawanda kuti apedzise kufamba kwese kwemaitiro acho. Pamwe chete nehuwandu hwakawanda hwekugadzirwa kwemwedzi, izvi zvinoreva kuti makumi ezviuru zvemawafer ari mufab anogara ari mufab kana kuti kwenguva pfupi yekuchengetera chero nguva. Panguva yekuchengetera, maFOUP anocheneswa nguva nenguva nenitrogen kudzivirira tsvina kuti isabata mawafer, zvichiita kuti kugadzirwa kuve kwakachena uye kwakavimbika.
1. Mabasa uye Kukosha kweFOUP
Basa guru reFOUP nderekudzivirira mawafer kubva mukuvhunduka kwekunze uye kusvibiswa, kunyanya kudzivirira kukanganiswa pakukura kwezviyo panguva yekutamiswa. Inodzivirira hunyoro kuburikidza nenzira dzakadai sekuchenesa gasi uye Local Atmosphere Control (LAC), ichivimbisa kuti mawafer anoramba ari mumamiriro akachengeteka achimirira danho rinotevera rekugadzira. Sisitimu yayo yakavharwa uye inodzorwa inobvumira chete zvinhu zvinodiwa kuti zvipinde, zvichideredza zvakanyanya mhedzisiro yakaipa yeVOCs, oxygen, uye hunyoro pamawafers.
Sezvo FOUP yakazara nemawafers makumi maviri nemashanu ichigona kurema kusvika pamakirogiramu mapfumbamwe, kutakurwa kwayo kunofanirwa kushandisa Automated Material Handling System (AMHS). Kuti izvi zviitike, FOUP yakagadzirwa nekubatanidza kwakasiyana-siyana kwema coupling plates, mapini, nemaburi, uye ine RFID electronic tag kuti zvive nyore kuziva nekupatsanura. Kubata uku otomatiki hakudi kushanda nemaoko, zvichideredza zvakanyanya zvikanganiso uye kuwedzera kuchengetedzeka uye kururama kwemaitiro ekugadzira.
2. Maumbirwo uye Kurongwa kweFOUP
Zviyero zvakajairika zveFOUP zvinosvika 420 mm muhupamhi, 335 mm muhupamhi, uye 335 mm mukukwirira. Zvikamu zvayo zvikuru zvinosanganisira: OHT yepamusoro (musoro wehowa) yekutakura pamusoro pechikwiriso; Gonhi repamberi rekushandisa wafer; Mabato epadivi, anowanzo nyorwa mavara kuti asiyanise nzvimbo dzekugadzirisa dzine mwero wakasiyana wekusvibiswa; nzvimbo yeKadhi yekuisa makadhi emeseji; uye RFID tag yepasi inoshanda sechiratidzo chakasiyana cheFOUP, ichibvumira maturusi nemahosi epamusoro kuti aione. Hwaro hwacho hwakashongedzwawo nemaburi mana ekuziva uye ekuisa maburi ekubatanidza nemidziyo uye nzvimbo dzekugadzirisa.
Zvichienderana nekushandiswa, maFOUP akakamurwa kuita mhando nhatu: PRD (yekugadzira), ENG (yemawafer einjiniya), uye MON (yemawafer ekutarisa). MaPRD FOUP anogona kushandiswa pakugadzira zvigadzirwa, marudzi eENG akakodzera R&D kana kuyedza, uye marudzi eMON akatsaurirwa pakutarisa maitiro ematanho akaita seCMP neDIFF. Zvakakosha kuziva kuti maPRD FOUP anogona kushandiswa kune ese ari maviri zvinangwa zveENG neMON, uye marudzi eENG anogona kushandiswa kuMON, asi kushanda kwemashure kunokonzera njodzi dzemhando yepamusoro.
Zvichienderana nezinga rekusvibiswa, maFOUP anogona kukamurwa kuita FE FOUP (nzira yekumberi, isina simbi), BE FOUP (nzira yekumashure, ine simbi), uye ayo akagadzirirwa maitiro chaiwo esimbi akadai seNI FOUP, CU FOUP, uye CO FOUP. MaFOUP emaitiro akasiyana anowanzo kusiyaniswa neruvara rwemibato yemativi kana mapaneru emusuwo. MaFOUP kubva kumaitiro ekumberi anogona kushandiswa mumaitiro ekumashure, asi maFOUP ekumashure haafanire kushandiswa mumaitiro ekumberi, sezvo izvi zvichikonzera njodzi yekusvibiswa.
Senzira huru yekugadzira ma "semiconductor", FOUP, kuburikidza nekushandisa otomatiki yakawanda uye kudzora kusvibiswa kwakasimba, inovimbisa kuchengetedzeka nekuchena kwema "wafers" panguva yekugadzira, zvichiita kuti ive nzvimbo inokosha mu "wafer fabs" dzemazuva ano.
Mhedziso
XKH yakazvipira kupa vatengi mhinduro dzakagadzirwa zvakanaka dzeFront-Opening Unified Pod (FOUP), tichitevedzera zvinodiwa nemaitiro enyu chaiwo uye zvinodiwa zvekushandisa. Tichishandisa tekinoroji yepamusoro yezvinhu uye maitiro ekugadzira nemazvo, tinoona kuti chigadzirwa chega chega cheFOUP chinopa kugadzikana kwemhepo, kuchena, uye kugadzikana kwemuchina. Chikwata chedu chehunyanzvi chine hunyanzvi hwakakura muindasitiri, chinopa rutsigiro rwakakwana rwehupenyu - kubva pakukurukurirana kwekusarudza uye kugadzirisa chimiro kusvika pakuchenesa nekugadzirisa - tichiona kubatanidzwa kwakanaka uye kushanda pamwe chete kwakanaka pakati peFOUP neAutomated Material Handling System (AMHS) pamwe nemidziyo yekugadzirisa. Tinogara tichikoshesa kuchengetedzeka kwemawafers uye kuwedzera goho rekugadzira sezvinangwa zvedu zvikuru. Kuburikidza nezvigadzirwa zvitsva uye masevhisi ehunyanzvi anosanganisira zvese, tinopa vimbiso yakasimba yemaitiro enyu ekugadzira semiconductor, pakupedzisira tichisimudzira kushanda zvakanaka kwekugadzira uye goho rezvigadzirwa.
Nguva yekutumira: Gunyana-08-2025